The differences in the behavior of Re (n-type) and Au (p-type) dopant atomsin single-layered MoS2 were investigated by in situ scanning transmissionelectron microscopy. Re atoms tend to occupy Mo sites, while Au atoms exist asadatoms and show larger mobility under the electron beam. Re substituted to Mosite showed enhanced chemical affinity, evidenced by agglomeration of Readatoms around these sites. This may explain the difficulties in achieving ahigh compositional rate of homogeneous Re doping in MoS2. In addition, an insitu coverage experiment together with density functional theory calculationsdiscovered a high surface reactivity and agglomeration of other impurity atomssuch as carbon at the Re doped sites.
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